Subsurface Sub-terahertz and Terahertz Tomography

Abstract

Development of millimeter and sub-millimeter wavelengths technologies is one of the most promising research areas, especially for applications in so called terahertz imaging. In the paper we consider a tomography approach for obtaining 3-D imaging in frequency range from 100 GHz up to 325 GHz. We apply the modernized image reconstruction method, based on developed earlier, for low frequency, surface imaging procedure [1]. We managed to significantly improve the image resolution by newly designed probes for millimeter and sub-millimeter wave range measurements. The images obtained demonstrate that the built measurement system and the image reconstruction method can be used for non-destructive testing applications such as the imaging of manufacturing defect on wafer.