Processing and characterization of functionally graded Ti/Ti xCy/DLC thin film coatings

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dc.contributor.authorTavşanoğlu, Tolga
dc.contributor.authorAddemir, Okan
dc.contributor.authorBaşaran, Engin
dc.contributor.authorAlkoy, Sedat
dc.date.accessioned2025-10-29T12:10:32Z
dc.date.issued2004
dc.departmentGebze Teknik Üniversitesi
dc.descriptionProceedings of the 8th Conference and Exhibition of the European Ceramic Society -- Istanbul -- 63890
dc.description.abstractIn this study diamond-like carbon based functionally graded Ti/Ti <inf>x</inf>C<inf>y</inf>/DLC films were deposited by the hybrid technique of magnetron sputtering and DC plasma-enhanced chemical vapor deposition. The coating parameters investigated are; substrate bias (60-200 V), sputtering power (1.0-1.1 kW) and plasma booster current (1.7-2.5 A). The mechanical properties were investigated by calotest and scratch adhesion tests. The elemental depth profiling and the morphology of the coatings were examined by secondary ion mass spectrometer (SIMS) and electron probe micro analyzer (EPMA) which revealed that a functionally graded structure was successfully formed. © 2020 Elsevier B.V., All rights reserved.
dc.description.sponsorshipEuropean Ceramic Society; Turkish Ceramic Society
dc.identifier.endpage596
dc.identifier.isbn9783035713657
dc.identifier.isbn9783038357155
dc.identifier.isbn9783035726473
dc.identifier.isbn9783035711363
dc.identifier.isbn087849300X
dc.identifier.isbn9783035711684
dc.identifier.isbn9783037857083
dc.identifier.isbn0878492844
dc.identifier.isbn9783038354253
dc.identifier.isbn9783035716382
dc.identifier.issn1662-9795
dc.identifier.issn1013-9826
dc.identifier.issueI
dc.identifier.scopus2-s2.0-8644230997
dc.identifier.scopusqualityQ4
dc.identifier.startpage593
dc.identifier.urihttps://hdl.handle.net/20.500.14854/15227
dc.identifier.volume264-268
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherTrans Tech Publications Ltd
dc.relation.ispartofKey Engineering Materials
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.snmzKA_Scopus_20251020
dc.subjectDiamond-like carbon
dc.subjectFunctionally graded coatings
dc.subjectSIMS
dc.subjectThin films
dc.titleProcessing and characterization of functionally graded Ti/Ti xCy/DLC thin film coatings
dc.typeConference Object

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