Phase transformation and paired-plate precipitate formation in Pb0.91La0.09Zr0.65Ti0.35O3 films grown on sapphire substrates

Basit Öğe Kaydı
dc.contributor.authorTunaboylu, B
dc.contributor.authorOzkan, CS
dc.contributor.authorAta, A
dc.contributor.authorRing, K
dc.contributor.authorEsener, S
dc.date.accessioned2025-10-29T11:20:54Z
dc.date.issued2002
dc.departmentFakülteler, Temel Bilimler Fakültesi, Matematik Bölümü
dc.descriptionSymposium on Advanced Materials for Microelectronics held at the Spring Meeting of the E-MRS -- JUN 18-21, 2002 -- STRASBOURG, FRANCE
dc.description.abstractWe report on the phase transformation behavior of Pb0.91La0.09Zr0.65Ti0.35O3 (9/65/35) PLZT films grown on r-sapphire substrates via rf-magnetron sputtering. A complex microstructure results in these films depending on deposition and annealing conditions. A random equiaxed polycrystalline grain morphology was observed after rapid thermal annealing or furnace annealing when the as-deposited films were predominantly pyrochlore. Precipitate formation (100-150 nm) was observed in PLZT films that were deposited at temperatures in excess of 490degreesC with a perovskite structure, after furnace annealing at 700degreesC. We believe that this is related to internal stresses in the films due to both the lattice mismatch and the thermal expansion mismatch between the PLZT film and the sapphire substrate. (C) 2002 Elsevier Science Ltd. All rights reserved.
dc.description.sponsorshipNatl Res Council, Appl Mat,STMicroelectr,Tegal Corp,Natl Inst Sci & Technol Mat
dc.identifier.doi10.1016/S1369-8001(02)00073-2
dc.identifier.endpage206
dc.identifier.issn1369-8001
dc.identifier.issn1873-4081
dc.identifier.issue2-3
dc.identifier.orcid0000-0001-6751-6851
dc.identifier.scopus2-s2.0-0036557764
dc.identifier.scopusqualityQ1
dc.identifier.startpage199
dc.identifier.urihttps://doi.org/10.1016/S1369-8001(02)00073-2
dc.identifier.urihttps://hdl.handle.net/20.500.14854/8775
dc.identifier.volume5
dc.identifier.wosWOS:000181760000022
dc.identifier.wosqualityQ2
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherElsevier Sci Ltd
dc.relation.ispartofMaterials Science in Semiconductor Processing
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.snmzKA_WOS_20251020
dc.subjectferroelectrics
dc.subjectPLZT
dc.subjectprecipitate splitting
dc.subjectmagnetron sputtering
dc.titlePhase transformation and paired-plate precipitate formation in Pb0.91La0.09Zr0.65Ti0.35O3 films grown on sapphire substrates
dc.typeConference Object

Dosyalar

Koleksiyon

WoS İndeksli Yayınlar Koleksiyonu
Scopus İndeksli Yayınlar Koleksiyonu
Temel Bilimler Fakültesi Koleksiyonu