Processing and characterization of functionally graded Ti/TixCy/DLC thin film coatings

Abstract

In this study diamond-like carbon based functionally graded Ti/TixCy/DLC films were deposited by the hybrid technique of magnetron sputtering and DC plasma-enhanced chemical vapor deposition. The coating parameters investigated are; substrate bias (60-200 V), sputtering power (1.0-1.1 kW) and plasma booster current (1.7-2.5 A). The mechanical properties were investigated by calotest and scratch adhesion tests. The elemental depth profiling and the morphology of the coatings were examined by secondary ion mass spectrometer (SIMS) and electron probe micro analyzer (EPMA) which revealed that a functionally graded structure was successfully formed.