Cobalt-titanium multilayer thin films: Effect of thickness of titanium spacer layer on impedance properties

Basit Öğe Kaydı
dc.contributor.authorSenturk, E.
dc.contributor.authorErkovan, M.
dc.contributor.authorOkutan, M.
dc.contributor.authorKosemen, A.
dc.contributor.authorOzturk, S.
dc.contributor.authorSahin, Y.
dc.date.accessioned2025-10-29T11:24:06Z
dc.date.issued2015
dc.departmentFakülteler, Temel Bilimler Fakültesi, Fizik Bölümü
dc.description.abstractWe investigated the impedance parameters of cobalt titanium (Co-Ti) multilayer thin films deposited on native oxidized Si (100) substrate under ultra-high vacuum (4 x 10(-8) mbar) by magnetron sputtering at room temperature. Electrical properties of Co/Ti/Co multilayer films were analyzed depending on the thickness of Ti spacer layer with the impedance spectroscopy as a function of frequency. Co/Ti multilayer films exhibited dielectric relaxation in both real and imaginary part of dielectric constants at the kilohertz frequency region and piezoelectric properties at the megahertz frequency region. We determined that the fabricated multilayer films have complex and super imposed type behavior when DC conductivity is used at lower frequency, resonance event and relaxation properties. (C) 2014 Elsevier Ltd. All rights reserved.
dc.identifier.doi10.1016/j.mssp.2014.10.053
dc.identifier.endpage485
dc.identifier.issn1369-8001
dc.identifier.issn1873-4081
dc.identifier.orcid0000-0002-5707-8090
dc.identifier.orcid0000-0002-7572-7963
dc.identifier.orcid0000-0002-4527-2056
dc.identifier.orcid0000-0002-4851-3062
dc.identifier.scopus2-s2.0-84911445457
dc.identifier.scopusqualityQ1
dc.identifier.startpage482
dc.identifier.urihttps://doi.org/10.1016/j.mssp.2014.10.053
dc.identifier.urihttps://hdl.handle.net/20.500.14854/9772
dc.identifier.volume30
dc.identifier.wosWOS:000347266900067
dc.identifier.wosqualityQ1
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherElsevier Sci Ltd
dc.relation.ispartofMaterials Science in Semiconductor Processing
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.snmzKA_WOS_20251020
dc.subjectMultilayer thin films
dc.subjectPiezoelectric
dc.subjectImpedance spectroscopy
dc.subjectDielectric properties
dc.titleCobalt-titanium multilayer thin films: Effect of thickness of titanium spacer layer on impedance properties
dc.typeArticle

Dosyalar

Koleksiyon

WoS İndeksli Yayınlar Koleksiyonu
Scopus İndeksli Yayınlar Koleksiyonu
Temel Bilimler Fakültesi Koleksiyonu