Simple fabrication of hexagonally well-ordered AAO template on silicon substrate in two dimensions

Abstract

In this study, thin anodic aluminum oxide (AAO) templates both on silicon substrates (AAO template/SiO2/Si) and Ti-coated silicon substrates (AAO template/Ti/SiO2/Si) were developed for design of magnetic, electronic and optoelectronic devices, chemical sensors and chip-scale lithium-ion rechargeable microbatteries. Two types of AAO template were prepared by using a two-step anodization procedure. The templates were characterized by scanning electron microscopy and energy dispersive X-ray spectroscopy. The obtained thin AAO templates were approximately 50 nm in diameter and 700 nm in length with 80-nm interpore distances in a relatively large area of 6 cm(2). A barrier layer of the AAO templates was removed by a cathodic polarization method in KCl solution for several seconds. The current-time transient during removing the alumina barrier layer of the thin AAO template and the mechanism of electrochemical dissolution of the barrier layer are given in detail.