WS2 thin film based quartz crystal microbalance gas sensor for dimethyl methylphosphonate detection at room temperature

Abstract

WS2 thin films were deposited on quartz crystal microbalance (QCM) oscillators via radio frequency magnetron sputtering to detect hazardous gases at room temperature (RT). WS2 coated QCM sensors were tested against various hazardous gases including acetone, toluene, xylene, isopropyl-alcohol, hydrogen cyanide, hydrogen sulfide, ammonia, dimethyl methylphosphonate (DMMP, nerve agent simulant) and 2-Chloroethyl ethyl sulfide (mustard simulant). It was observed that fabricated sensors exhibit superior sensor performance to DMMP gas at RT. Additionally, one of the sensors showed reliable stability, high sensitivity, and a low theoretical limit of detection of 5 ppb. As a result, WS2 coated QCM sensor has a great potential for the monitoring of nerve agent.