Growth, structural and vibrational properties of hydrogenated nanocrystalline silicon thin films prepared by radiofrequency magnetron sputtering technique at room temperature

Abstract

The main objective of this paper is to produce the hydrogen-free and hydrogenated nanocrystalline silicon (nc-Si: H(x)) thin films deposited onto the single-crystalline Si(100) wafer by radio-frequency magnetron sputtering (RF-MS) at a substrate temperature of -300 K. Sputtering was effectuated by a microwave plasma in a mixture of argon and hydrogen (Ar + (H2(x)) gasses taken at different proportions of hydrogen dilution: x = 0, 2.5, and 5 sccm (standard cubic centimeter per minute). The deposition rates of the nc-Si : H were fully controlled, and the thickness of these films was -200 and 300 angstrom. Pt -capping layer was deposited in order to protect the nc-Si : H layer from oxidation. The thickness of the capping layer was fixed at -5 angstrom. The effects of the hydrogen flow rate and post-growth thermal treatment on the crystalline structure and morphology of as-grown nanocrystalline silicon thin films were systematically investigated by ultraviolet and x-ray photoelectron spectroscopy (UPS and XPS), atomic force microscopy (AFM), grazing incidence x-ray diffraction (GI-XRD) and micro-Raman spectroscopy methods. From the measured data, the average nano -crystallite sizes, surface morphology and other important characteristics of these thin films were analyzed. The grown nc-Si : H thin films may be used as a semiconducting electrode material for electrochemical proton pro-duction, which is of great technological importance, especially for solid-state electrochromic device applications.